JPH0515945Y2 - - Google Patents
Info
- Publication number
- JPH0515945Y2 JPH0515945Y2 JP6312889U JP6312889U JPH0515945Y2 JP H0515945 Y2 JPH0515945 Y2 JP H0515945Y2 JP 6312889 U JP6312889 U JP 6312889U JP 6312889 U JP6312889 U JP 6312889U JP H0515945 Y2 JPH0515945 Y2 JP H0515945Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- air
- vacuum
- clean bench
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009423 ventilation Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000011045 prefiltration Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6312889U JPH0515945Y2 (en]) | 1989-05-30 | 1989-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6312889U JPH0515945Y2 (en]) | 1989-05-30 | 1989-05-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH033438U JPH033438U (en]) | 1991-01-14 |
| JPH0515945Y2 true JPH0515945Y2 (en]) | 1993-04-27 |
Family
ID=31592901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6312889U Expired - Lifetime JPH0515945Y2 (en]) | 1989-05-30 | 1989-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0515945Y2 (en]) |
-
1989
- 1989-05-30 JP JP6312889U patent/JPH0515945Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH033438U (en]) | 1991-01-14 |
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